Item | Unit | Specifications | Condition | |
Typ. | ||||
Supply voltage | V | 2.7 ~ 3.3 | ||
Operating temperature | ℃ | -20 ~ +80 | ||
Scale factor | Output 1 | mV/(°・s-1) | 0.8 | |
Output 2 | 3.624 | |||
Rate range | Output 1 | deg/s | +/-1500 | |
Output 2 | +/-300 | |||
Scale factor tolerance | % | +/-8 | Ta=25℃ | |
Scale factor variation with temp. | % | +/-5 | VDD=3.0V Ta=25℃Based | |
Bias output | mV | 1500 | Ta=25℃ | |
Bias variation with temp. | Output 1 | mV | +/-50 | VDD=3.0V Ta=25℃Based |
Output 2 | +/-100 | VDD=3.0V Ta=25℃Based | ||
Reference voltage | mV | 1500 | Ta=25℃ | |
Size | mm | 5.0 x 3.2 x t1.3 |
它是由具有高稳定、高精度等优越特征的石英材料“QUARTZ”和“MEMS”(精微加工技术)组成的合成词。与以半导体为材料的MEMS相对应,以石英为原料进行精微加工而提供小型化、高性能的石英晶体元器件被称为“QMEMS”。
QMEMS是爱普生拓优科梦(Epson Toyocom)的注册商标。