PLC 工控机 嵌入式系统 人机界面 工业以太网 现场总线 变频器 机器视觉 DCS PAC/PLMC SCADA 工业软件 ICS信息安全 无线通讯 机箱机柜
昆山熙日机械设备有限公司
thyrcont图拉特真空计VSR53E
The combination of piezo and Pirani sensor in the digital VSR vacuum transducer with EtherCAT interface offers high precision and excellent resolution in the rough and fine vacuum range.
Microcontroller intelligence automatically manages the optional interplay of both vacuum sensors. Smartline vacuum gauges represents cutting edge technology providing safe, precise and cost effective process control.
描述
Wide measuring range due to combination sensor piezo / Pirani
High accuracy and optimal resolution over the whole measuring range
Excellent reproducibility and long term stability
Digital RS485 interface and EtherCAT
Automatic baud rate detection 9.6 kBd to 115 kBd
Two independent, potential-free relay switch points
Easily replaceable sensor heads with stored calibration data
Vacuum connection using stainless steel small flange DN 16 KF
应用
Load locks
Analysis technology
Coating plants
Vacuum furnaces
Leakages tests
Operational control of roughing pumps
Process engineering
技术参数
WEIGHT | 0.220 kg |
---|---|
MEASURING PRINCIPLE | Membran piezoresistiv / Pirani |
MATERIALS IN CONTACT WITH VACUUM | Stainless steel 1.4307, nickel, gold, silicon oxide, tungsten, glass |
MEASUREMENT RANGE | 1200 – 1e-4 mbar (900 – 1e-4 Torr), max. overpressure 4 bar abs. |
ACCURACY | 1200 – 10 mbar: ±0.3% full scale 10 – 2e-3 mbar: ±10% from reading |
REPEATABILITY | 1200-10 mbar: ±0,1 % full scale, 10-2e-3 mbar: ±2% from reading |
REACTION TIME | 1200 – 10 mbar: < 30ms (piezo) 10 – 2e-3 mbar: < 100 ms (Pirani) |
POWER SUPPLY | 20 – 30 VDC |
ELECTRICAL CONNECTION | M12 circular connector, female, lockable, 1x A standard, 5pol., 2x D coded, 4 pol. |
POWER CONSUMPTION | 2.5 W, additionally 0.8 W for EtherCAT / relays /LCD |
OPERATING TEMPERATURE | +5…+60°C (rel. humidity max . 80% at 30°C noncondensing) |
STORAGE TEMPERATURE | -40…+65°C |
MAX. BAKE OUT TEMPERATURE | 125°C at the flange |
SERIAL INTERFACE | RS485: 9.6 kBd to 115 kBd, address switch 1 – 16 |
SWITCH POINT | 2 switch-over relays, 50 VAC / 2 A, 30 VDC / 2 A, max. 60 VA |
VACUUM CONNECTION | DN 16 ISO-KF |
PROTECTION CLASS | IP54 |
附件
man_vsr53-54_de_en.pdf
vsre.pdf
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