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thyrcont图拉特真空计VSR53DL

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thyrcont图拉特真空计VSR53DL

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图拉特真空计VSR53DL

Thyracont-Smartline-Vakuumtransmitter-VSR54DL-3055-59.jpg

VSR53DL Vacuum Transducer ● DN16KF ● LCD Display

The combination of piezo and Pirani sensor in the digital VSR vacuum transducer offers high precision and excellent resolution in the rough and fine vacuum range.
Microcontroller intelligence automatically manages the optional interplay of both vacuum sensors. Smartline vacuum gauges represent cutting edge technology providing safe, precise and cost effective process control.

描述

Wide measuring range due to combination sensor piezo / Pirani
High accuracy and optimal resolution over the whole measuring range
Excellent reproducibility and long term stability
Digital RS485 interface and additional analog output signal 1.5-8.58 V
Automatic baud rate detection 9.6 kBd to 115 kBd
Large integrated LCD display with background illumination
Two independent, potential-free relay switch points
Easily replaceable sensor heads with stored calibration data

应用

Load locks
Analysis technology
Coating plants
Vacuum furnaces
Leakages tests
Operational control of roughing pumps
Process engineering

技术参数

WEIGHT	0.220 kg
MEASURING PRINCIPLE	Membran piezoresistiv / Pirani
MATERIALS IN CONTACT WITH VACUUM	Stainless steel 1.4307, nickel, gold, silicon oxide, tungsten, glass
MEASUREMENT RANGE	1200 – 1e-4 mbar (900 – 1e-4 Torr), max. overpressure 4 bar abs.
ACCURACY	1200 – 10 mbar: ±0.3% full scale 10 – 2e-3 mbar: ±10% from reading
REPEATABILITY	1200-10 mbar: ±0,1 % full scale, 10-2e-3 mbar: ±2% from reading
REACTION TIME	1200 – 10 mbar: < 30ms (piezo) 10 – 2e-3 mbar: < 100 ms (Pirani)
POWER SUPPLY	20 – 30 VDC
ELECTRICAL CONNECTION	SubD 15pol., male, lockable
POWER CONSUMPTION	2.5 W, additionally 0.8 W for EtherCAT / relays /LCD
OPERATING TEMPERATURE	+5…+60°C (rel. humidity max . 80% at 30°C noncondensing)
STORAGE TEMPERATURE	-40…+65°C
MAX. BAKE OUT TEMPERATURE	125°C at the flange
OUTPUT SIGNAL	0-10 VDC, measuring range 1.5 to 8.58 VDC, logarithmic, 1V / decade, load resistor > 10 kOhm
SERIAL INTERFACE	RS485: 9.6 kBd to 115 kBd, address switch 1 – 16
SWITCH POINT	2 switch-over relays, 50 VAC / 2 A, 30 VDC / 2 A, max. 60 VA
PROTECTION CLASS	IP40