主要特征
Explanation
- 4-10.5G Glass Transfer Robot
- Beam Type Z-Axis By application Min P/L High contrast Z-Axis Stroke
SPEC Information
■ Unit Stroke
• Arm Stroke : ±920mm
• Z-Axis Stroke : 1,500mm
• T-Axis : 330deg
• X-Axis Stroke : consultation
■ Unit Speed
• Arm Stroke : 160deg/s
• Z-Axis Stroke : 1,000mm/s
• T-Axis : 130deg/s
■ Precision : ±0.2mm
■ Cleanliness : Class10( 0.1 ㎛ )
■ Arm Type : Single Arm