设备主要特点/Features:
1、独立调压摇摆架喷淋
Independent pressure regulation vibration frame is used for spraying.
2、显影配机械式消泡泵,有效消除泡沫节约成本,可提高做板质量
Mechanical defoaming pump is used in developing module to eliminate
foam effectively which can save cost and improve panel quality.
工艺流程/Schematic:
入板→显影→新液洗→冲污水→循环水洗→清水洗→干板组合→出板
Input→Developing→Fresh Solution→Waste Wr→Circulation Wr/s→Fresh Rinse→Drying Module→Output